I got this fixed by manually downgrading packages libsystemd0 and
systemd to versions 229-4ubuntu21.10. I just downloaded those from here:
https://launchpad.net/~ubuntu-security-
proposed/+archive/ubuntu/ppa/+build/15710450

After rebooting the server, the system works again fine. Anyway, now I
have to take care, that I don't upgrade my other VPS servers before this
bug has been corrected.

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https://bugs.launchpad.net/bugs/1818814

Title:
  systemd-tmpfiles-setup.services fails to create /var/run directories

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